Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

ABSTRACT

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

MATERIALS

Product Number

Brand

Product Description

GF24976525

Titanium, rod, 200mm, diameter 25mm, annealed, 99.6+%

595063

Sigma-Aldrich

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IRMM531B

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266035

Sigma-Aldrich

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369489

Sigma-Aldrich

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348848

Sigma-Aldrich

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348791

Sigma-Aldrich

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305812

Sigma-Aldrich

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460400

Sigma-Aldrich

Titanium, wire, diam. 0.25 mm, 99.7% trace metals basis

267902

Sigma-Aldrich

Titanium, wire, diam. 0.81 mm, 99.7% trace metals basis

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Titanium, wire reel, 2m, diameter 1.0mm, as drawn, 99.99+%

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GF96391402

Titanium, wire reel, 25m, diameter 0.20mm, annealed, 99.6+%

GF43403431

Titanium, wire reel, 500m, diameter 0.20mm, annealed, 99.6+%

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Titanium, wire reel, 200m, diameter 0.20mm, annealed, 99.6+%

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Titanium, wire reel, 5m, diameter 0.25mm, as drawn, 99.99+%

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Titanium, wire reel, 25m, diameter 0.25mm, annealed, 99.6+%

GF50624434

Titanium, wire reel, 200m, diameter 0.25mm, annealed, 99.6+%

GF46592949

Titanium, wire, straight, 1000mm, diameter 1.0mm, as drawn, 99.6+%

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Titanium, wire reel, 200m, diameter 0.25mm, as drawn, 99.6+%

GF32801251

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Titanium, tube, 100mm, outside diameter 6.35mm, inside diameter 5.53mm, wall thickness 0.41mm, annealed, 99.6+%

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Titanium, tube, 1220mm, outside diameter 2.03mm, inside diameter 1.55mm, wall thickness 0.24mm, annealed, 99.6+%

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Titanium, rod, 25mm, diameter 16mm, as drawn, 99.99+%

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Titanium, tube, 1000mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

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Titanium, tube, 100mm, outside diameter 2.03mm, inside diameter 1.55mm, wall thickness 0.24mm, annealed, 99.6+%

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