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Fused-silica focusing lens for deep UV laser processing.

Fused-silica focusing lens for deep UV laser processing.

Applied optics (1992-08-01)

T Y Hung, C S Su

RESUMEN

A simple four-element fused-silica lens is presented that has a focal length of 31.2 mm and a relative aperture of f/1 for use as a focusing lens for deep UV laser processing. The curvature of the lens is designed with a practical design method to match the curvature of existing optical tools. By applying an 8.5-mm beam diameter Nd:YAG laser at a wavelength of 266 nm through the lens, we can easily achieve the percussion drilled into samples of 25-microm-thick tantalum foil with a hole diameter of <6 microm. When the lens and/or the sample is tilted, the shape of the drilled hole is in agreement with the Gaussian beam spot simulation.

MATERIALES

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Descripción del producto

Tantalum, foil, 50x50mm, thickness 0.5mm, annealed, 99.9%

Tantalum, foil, 100x100mm, thickness 1.0mm, annealed, 99.9%

Tantalum, foil, light tested, 150x150mm, thickness 0.05mm, annealed, 99.9%

Tantalum, foil, 100x100mm, thickness 0.25mm, annealed, 99.9%

Tantalum, foil, 100x100mm, thickness 0.100mm, annealed, 99.9%

Tantalum, foil, 100x100mm, thickness 0.125mm, annealed, 99.9%

Tantalum, foil, 50x50mm, thickness 6.0mm, 99.9%

Tantalum, foil, 150x150mm, thickness 0.100mm, annealed, 99.9%

Tantalum, foil, 1m coil, thickness 0.04mm, coil width 1mm, annealed, 99.9%

Tantalum, foil, light tested, 100x100mm, thickness 0.025mm, as rolled, 99.9%

Tantalum, foil, 1m coil, thickness 0.009mm, 99.9%

Tantalum, foil, light tested, 25x25mm, thickness 0.034mm, as rolled, 99.9%

Tantalum, foil, 25x25mm, thickness 1.0mm, annealed, 99.9%

Tantalum, foil, light tested, 100x100mm, thickness 0.03mm, as rolled, 99.9%

Tantalum, foil, light tested, 100x100mm, thickness 0.05mm, annealed, 99.9%

Tantalum, foil, not light tested, 25x25mm, thickness 0.004mm, 99.9%

Tantalum, foil, 100x100mm, thickness 0.25mm, annealed, 99.99%

Tantalum, foil, 25x25mm, thickness 0.5mm, annealed, 99.9%

Tantalum, foil, 25x25mm, thickness 0.5mm, annealed, 99.99%

Tantalum, foil, 25x25mm, thickness 2.0mm, annealed, 99.9%

Tantalum, foil, 0.2m coil, thickness 0.009mm, 99.9%

Tantalum, foil, 1m coil, thickness 0.1mm, coil width .62mm, as rolled, 99.9%

Tantalum, foil, 4mm disks, thickness 0.75mm, annealed, 99.9%

Tantalum, foil, light tested, 120x120mm, thickness 0.025mm, as rolled, 99.9%

Tantalum, foil, light tested, 25x25mm, thickness 0.025mm, as rolled, 99.9%

Tantalum, foil, light tested, 50x50mm, thickness 0.034mm, as rolled, 99.9%

Tantalum, foil, not light tested, 25x25mm, thickness 0.0075mm, 99.9%

Tantalum, foil, 50x50mm, thickness 0.25mm, annealed, 99.99%

Tantalum, foil, 4mm disks, thickness 0.02mm, 99.9%

Tantalum, foil, 4mm disks, thickness 0.075mm, annealed, 99.9%