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Merck
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463094

Sigma-Aldrich

三甲基硼

electronic grade, ≥98.35%

同義詞:

Trimethylborane

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About This Item

線性公式:
B(CH3)3
CAS號碼:
分子量::
55.91
EC號碼:
MDL號碼:
分類程式碼代碼:
12352300
PubChem物質ID:

等級

electronic grade

化驗

≥98.35%

形狀

gas

反應適用性

core: boron

雜質

<1 ppm Oxygen (O2)
<1.5% Dimethylethylborane [B(CH3)2C2H5]
<10 ppm Carbon dioxide (CO2)
<10 ppm Nitrogen (N2)
<100 ppm Methane (CH4)
<1000 ppm Trimethylamine (TMA)
<50 ppm Hydrogen (H2)

bp

−20.2 °C (lit.)

mp

−161.5 °C (lit.)

SMILES 字串

CB(C)C

InChI

1S/C3H9B/c1-4(2)3/h1-3H3

InChI 密鑰

WXRGABKACDFXMG-UHFFFAOYSA-N

應用

三甲基硼可作为硼-碳膜化学气相沉积的有机金属前体,以及硼磷硅玻璃 (BPSG) 沉积的硼源。
化学气相沉积 (CVD) 所形成碳化硼薄膜的前体。

推薦產品

建议使用不锈钢调节器 Z527416 或 Z527424。

象形圖

Gas cylinderCorrosion

訊號詞

Danger

危險聲明

危險分類

Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1B

儲存類別代碼

2A - Gases

水污染物質分類(WGK)

WGK 1

閃點(°F)

Not applicable

閃點(°C)

Not applicable

個人防護裝備

Faceshields, Gloves, Goggles, multi-purpose combination respirator cartridge (US)


分析證明 (COA)

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