Insulating Carbon Nanotubes by Atomic Layer Deposition for Electrical Wiring Purposes.

Carbon Nanotubes (CNTs) are coated by an insulator (Al2O3) shell using the atomic layer deposition (ALD) technique. This is achieved in large quantities (tens of milligrams per batch) for electrical wiring purposes. Here we present a transmission electron microscopy (TEM) characterization together with a detailed high resolution elemental analysis by in-column energy dispersive X-ray spectroscopy (EDXS). An excellent conformality of the insulator around the CNTs is obtained. Moreover, the elemental maps show the composition of the shell while the line scan analyses demonstrate an abrupt shell-CNT interface achieved by our ALD approach.