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463094

Sigma-Aldrich

Trimethylboron

electronic grade, ≥98.35%

Synonym(s):

Trimethylborane

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About This Item

Linear Formula:
B(CH3)3
CAS Number:
593-90-8
Molecular Weight:
55.91
EC Number:
209-816-3
MDL number:
MFCD00058727
UNSPSC Code:
12352300
PubChem Substance ID:
24869894

grade

electronic grade

Assay

≥98.35%

form

gas

reaction suitability

core: boron

impurities

<1 ppm Oxygen (O2)
<1.5% Dimethylethylborane [B(CH3)2C2H5]
<10 ppm Carbon dioxide (CO2)
<10 ppm Nitrogen (N2)
<100 ppm Methane (CH4)
<1000 ppm Trimethylamine (TMA)
<50 ppm Hydrogen (H2)

bp

−20.2 °C (lit.)

mp

−161.5 °C (lit.)

SMILES string

CB(C)C

InChI

1S/C3H9B/c1-4(2)3/h1-3H3

InChI key

WXRGABKACDFXMG-UHFFFAOYSA-N

Application

Precursor to boron carbide thin films by chemical vapor deposition (CVD).
Trimethylboron is used as an organometallic precursor for the CVD of boron-carbon containing films and as a boron source in the deposition of borophosphosilicate glass (BPSG).

Recommended products

Stainless steel regulators Z527416 or Z527424 are recommended.

Pictograms

Gas cylinderCorrosion
GHS04,GHS05

Signal Word

Danger

Hazard Statements

H280,H314

Hazard Classifications

Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1B

Storage Class Code

2A - Gases

WGK

WGK 1

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Certificates of Analysis (COA)

Search for Certificates of Analysis (COA) by entering the products Lot/Batch Number. Lot and Batch Numbers can be found on a product’s label following the words ‘Lot’ or ‘Batch’.

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