Atomic layer deposition and properties of ZrO

Atomic layer deposition and properties of ZrO

Beilstein journal of nanotechnology (2018-02-15)

Kristjan Kalam, Helina Seemen, Peeter Ritslaid, Mihkel Rähn, Aile Tamm, Kaupo Kukli, Aarne Kasikov, Joosep Link, Raivo Stern, Salvador Dueñas, Helena Castán, Héctor García

PMID29441257

ABSTRACT

Thin solid films consisting of ZrO

MATERIALS

Product Number

Brand

Product Description

F408

Sigma-Aldrich

Ferrocene, 98%