Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

摘要

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

材料

货号

品牌

产品描述

366994

Sigma-Aldrich

钛, powder, <45 μm avg. part. size, 99.98% trace metals basis

348791

Sigma-Aldrich

钛, foil, thickness 0.127 mm, 99.7% trace metals basis

267503

Sigma-Aldrich

钛, foil, thickness 0.25 mm, 99.7% trace metals basis

595063

Sigma-Aldrich

氮化钛, <3 μm

268496

Sigma-Aldrich

钛, powder, −100 mesh, 99.7% trace metals basis

460400

Sigma-Aldrich

钛, wire, diam. 0.25 mm, 99.7% trace metals basis

268526

Sigma-Aldrich

钛, sponge, 1-20 mm, 99.5% trace metals basis

369489

Sigma-Aldrich

钛, foil, thickness 2.0 mm, 99.7% trace metals basis

348848

Sigma-Aldrich

钛, foil, thickness 0.025 mm, 99.98% trace metals basis

348805

Sigma-Aldrich

钛, foil, thickness 0.5 mm, 99.99% trace metals basis

767506

Sigma-Aldrich

钛, sputtering target, diam. × thickness 2.00 in. × 0.25 in., 99.995% trace metals basis

GF16031843

钛, mesh, 100x100mm, nominal aperture 0.19mm, wire diameter 0.23mm, 60x60 wires/inch, open area 20%, twill weave

460397

Sigma-Aldrich

钛, foil, thickness 0.127 mm, ≥99.99% trace metals basis

GF29374005

钛, mesh, 100x100mm, nominal aperture 4.3mm, wire diameter 1.5mm, 4.4x4.4 wires/inch, open area 94%, platinized diamond mesh

267481

Sigma-Aldrich

钛, foil, thickness 0.25 mm, 99.99% trace metals basis

266035

Sigma-Aldrich

钛, wire, diam. 1.0 mm, 99.99% trace metals basis

305812

Sigma-Aldrich

钛, 5-10 mm, ≥99.99% trace metals basis (purity exclusive of Na and K content)

348864

Sigma-Aldrich

钛, wire, diam. 0.5 mm, 99.99% trace metals basis

267902

Sigma-Aldrich

钛, wire, diam. 0.81 mm, 99.7% trace metals basis

GF31127712

钛, rod, 10mm, diameter 50mm, 99.99+%

GF14990935

钛, tube, 1000mm, outside diameter 10.3mm, inside diameter 8.7mm, wall thickness 0.8mm, annealed, 99.6+%

GF46592949

钛, wire, straight, 1000mm, diameter 1.0mm, as drawn, 99.6+%

GF49264713

钛, tube, 200mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

433667

Sigma-Aldrich

钛, evaporation slug, diam. × L 6.3 mm × 6.3 mm, ≥99.99% trace metals basis

GF86399106

钛, tube, 500mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

GF62977540

钛, tube, 200mm, outside diameter 2.03mm, inside diameter 1.63mm, wall thickness 0.2mm, annealed, 99.6+%

GF13900205

钛, tube, 100mm, outside diameter 0.51mm, inside diameter 0.35mm, wall thickness 0.08mm, annealed, 99.6+%

GF95731960

钛, tube, 500mm, outside diameter 3.0mm, inside diameter 1.5mm, wall thickness 0.75mm, annealed, 99.6+%

GF90963928

钛, rod, 25mm, diameter 50mm, 99.99+%

GF43519945

钛, wire reel, 2m, diameter 1.0mm, as drawn, 99.99+%