669008

四(二甲基胺基)钛(IV)

packaged for use in deposition systems

• 别名: TDMAT, 四(二甲基氨基)钛(IV)
• 线性分子式: [(CH₃)₂N]₄Ti
• CAS号: 3275-24-9
• 分子量: 224.17
• EC號碼: 221-904-3
• MDL號碼: MFCD00014861
• 分類程式碼代碼: 12352103
• PubChem物質ID: 24885015
• NACRES: NA.23

属性

• 化驗: 99.999% (trace metals analysis)
• 形狀: liquid
• 反應適用性: core: titanium
• bp: 50 °C/0.5 mmHg (lit.)
• 密度: 0.947 g/mL at 25 °C (lit.)
• SMILES 字串: CN(C)[Ti](N(C)C)(N(C)C)N(C)C
• InChI: 1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
• InChI 密鑰: MNWRORMXBIWXCI-UHFFFAOYSA-N

说明

一般說明

Atomic number of base material: 22 Titanium

應用

Precursors Packaged for Depositions Systems

The product is a precursor for the deposition of titanium dioxide thin films by atomic layer deposition with water. Tetrakis(dimethylamido)titanium(IV) (TDMAT) undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

安全信息

• 象形圖: GHS02,GHS05
• 訊號詞: Danger
• 危險聲明: H225,H260,H314
• 防範說明: P210 - P223 - P231 + P232 - P280 - P303 + P361 + P353 - P305 + P351 + P338
• 危險分類: Flam. Liq. 2 - Skin Corr. 1B - Water-react 1
• 安全危害: EUH014
• 儲存類別代碼: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• 水污染物質分類（WGK）: WGK 3
• 閃點（°F）: -22.0 °F - closed cup
• 閃點（°C）: -30 °C - closed cup
• 個人防護裝備: Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter