333395

ジクロロシラン

≥99.99% trace metals basis

• 化学式: Cl₂SiH₂
• CAS番号: 4109-96-0
• 分子量: 101.01
• EC Number: 223-888-3
• MDL番号: MFCD00011600
• UNSPSCコード: 12352300
• PubChem Substance ID: 24860129

特性

• 蒸気密度: 3.5 (vs air)
• 蒸気圧: 1254 mmHg ( 20 °C)
• 詳細: film resistivity > 50 Ω-cm
• アッセイ: ≥99.99% trace metals basis
• 自己発火温度: 136 °F
• expl. lim.: 99 %
• bp: 8.3 °C (lit.)
• mp: −122 °C (lit.)
• SMILES記法: Cl[SiH2]Cl
• InChI: 1S/Cl2H2Si/c1-3-2/h3H2
• InChI Key: MROCJMGDEKINLD-UHFFFAOYSA-N

詳細

詳細

Dichlorosilane (DCS) is a halogenated silicon based precursor that facilitates the growth of a variety of silane based films such as silicon oxide, silicon nitride, silicon carbide, and epitaxial growth of silica.

アプリケーション

DCS is widely used in the synthesis of a variety of silicon-based materials, which find applications in the development of organic electronics based devices, including OFETs, MEMS, NEMS, MOSFETS, and lithium-ion batteries.

安全性情報

• ピクトグラム: GHS02,GHS04,GHS06,GHS05
• シグナルワード: Danger
• 危険有害性情報: H220,H280,H314,H330
• 注意書き: P260 - P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338 - P410 + P403
• 危険有害性の分類: Acute Tox. 2 Inhalation - Eye Dam. 1 - Flam. Gas 1 - Press. Gas Liquefied gas - Skin Corr. 1B
• 補足的ハザード: EUH014,EUH071
• 保管分類コード: 2A - Gases
• WGK: WGK 1
• 引火点(°F): -34.6 °F
• 引火点(℃): -37 °C
• 個人用保護具 (PPE): Faceshields, Gloves, Goggles, multi-purpose combination respirator cartridge (US)