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Tris(dimethylamino)silane electronic grade, 99.999%

Tris(dimethylamino)silane

Tris(dimethylamino)silane electronic grade, 99.999%

Synonym(s):

(Me₂N)₃SiH, N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine, TDMAS, Tris(dimethylamido)silane

Linear Formula:

((CH₃)₂N)₃SiH

CAS Number:

Molecular Weight:

161.32

EC Number:

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570133

Tris(dimethylamino)silane, electronic grade, 99.999%