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Tris(dimethylamino)silane packaged for use in deposition systems

Tris(dimethylamino)silane

Tris(dimethylamino)silane packaged for use in deposition systems
Synonym(s):
(Me2N)3SiH, N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine, TDMAS, Tris(dimethylamido)silane, Tris(dimethylamino)silane
Linear Formula:
((CH3)2N)3SiH
CAS Number:
15112-89-7
Molecular Weight:
161.32
EC Number:
239-165-0

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