Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

ABSTRACT

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

MATERIALS

Product Number

Brand

Product Description

595063

Sigma-Aldrich

Titanium nitride, <3 μm

IRMM531C

Titanium, IRMM^®, certified reference material, 0.5 mm wire

IRMM531B

Titanium, IRMM^®, certified reference material, 0.5 mm foil

369489

Sigma-Aldrich

Titanium, foil, thickness 2.0 mm, 99.7% trace metals basis

348848

Sigma-Aldrich

Titanium, foil, thickness 0.025 mm, 99.98% trace metals basis

266035

Sigma-Aldrich

Titanium, wire, diam. 1.0 mm, 99.99% trace metals basis

348791

Sigma-Aldrich

Titanium, foil, thickness 0.127 mm, 99.7% trace metals basis

305812

Sigma-Aldrich

Titanium, 5-10 mm, ≥99.99% trace metals basis (purity exclusive of Na and K content)

460400

Sigma-Aldrich

Titanium, wire, diam. 0.25 mm, 99.7% trace metals basis

267902

Sigma-Aldrich

Titanium, wire, diam. 0.81 mm, 99.7% trace metals basis

GF91672139

Titanium, wire reel, 20m, diameter 0.05mm, hard, 99.8%

GF43519945

Titanium, wire reel, 2m, diameter 1.0mm, as drawn, 99.99+%

GF34996685

Titanium, wire reel, 200m, diameter 0.125mm, annealed, 99.6+%

GF96391402

Titanium, wire reel, 25m, diameter 0.20mm, annealed, 99.6+%

GF80908544

Titanium, wire reel, 1m, diameter 1.5mm, as drawn, 99.6+%

GF43403431

Titanium, wire reel, 500m, diameter 0.20mm, annealed, 99.6+%

GF36425707

Titanium, wire reel, 200m, diameter 0.20mm, annealed, 99.6+%

GF31085760

Titanium, wire reel, 5m, diameter 0.25mm, as drawn, 99.99+%

GF14377631

Titanium, wire reel, 25m, diameter 0.25mm, annealed, 99.6+%

GF50624434

Titanium, wire reel, 200m, diameter 0.25mm, annealed, 99.6+%

GF46592949

Titanium, wire, straight, 1000mm, diameter 1.0mm, as drawn, 99.6+%

GF00761217

Titanium, wire reel, 200m, diameter 0.25mm, as drawn, 99.6+%

GF84917188

Titanium, wire reel, 1m, diameter 0.25mm, as drawn, 99.99+%

GF32801251

Titanium, tube, 1000mm, outside diameter 1.05mm, inside diameter 0.75mm, wall thickness 0.15mm, annealed, 99.6+%

GF25880485

Titanium, tube, 100mm, outside diameter 6.35mm, inside diameter 5.53mm, wall thickness 0.41mm, annealed, 99.6+%

GF68670366

Titanium, tube, 1220mm, outside diameter 2.03mm, inside diameter 1.55mm, wall thickness 0.24mm, annealed, 99.6+%

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Titanium, rod, 25mm, diameter 16mm, as drawn, 99.99+%

GF72212813

Titanium, tube, 200mm, outside diameter 25.4mm, inside diameter 23.62mm, wall thickness 0.89mm, annealed, 99.6+%

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Titanium, tube, 1000mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

GF13915447

Titanium, tube, 100mm, outside diameter 2.03mm, inside diameter 1.55mm, wall thickness 0.24mm, annealed, 99.6+%