Nanolithography. Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures.

Nanolithography. Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures.

Science (New York, N.Y.) (2014-12-17)

Huang Gao, Yaowu Hu, Yi Xuan, Ji Li, Yingling Yang, Ramses V Martinez, Chunyu Li, Jian Luo, Minghao Qi, Gary J Cheng

ABSTRACT

We report a low-cost, high-throughput benchtop method that enables thin layers of metal to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations. Laser shock imprinting can create three-dimensional crystalline metallic structures as small as 10 nanometers with ultrasmooth surfaces at ambient conditions. This technique enables the successful fabrications of large-area, uniform nanopatterns with aspect ratios as high as 5 for plasmonic and sensing applications, as well as mechanically strengthened nanostructures and metal-graphene hybrid nanodevices.

MATERIALS

Product Number

Brand

Product Description

265799

Sigma-Aldrich

Gold, wire, diam. 1.0 mm, 99.99% trace metals basis

265780

Sigma-Aldrich

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268461

Sigma-Aldrich

Gold, foil, thickness 0.025 mm, 99.99% trace metals basis

373184

Sigma-Aldrich

Gold, evaporation slug, diam. × L 0.3 cm × 0.6 cm, 99.99% trace metals basis

326496

Sigma-Aldrich

Gold, foil, thickness 0.127 mm, 99.99% trace metals basis

265810

Sigma-Aldrich

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349313

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255734

Sigma-Aldrich

Gold, powder, <850 μm, ≥99.99% trace metals basis

643289

Sigma-Aldrich

Gold coated glass cover slip, 99.999% (Au), diam. × thickness 15 mm × 130-170 μm, layer thickness 100 Å

643254

Sigma-Aldrich

Gold coated glass cover slip, L × W × thickness 22 mm × 22 mm × 130-170 μm, square, 99.999% (Au), layer thickness 100 Å

643203

Sigma-Aldrich

Gold coated glass slide, 99.999% (Au), layer thickness 100 Å

643246

Sigma-Aldrich

Gold coated glass slide, layer thickness 1000 Å, 99.999% (Au)

636347

Sigma-Aldrich

Gold, nanopowder, <100 nm particle size, 99.9% trace metals basis

GF20403638

Gold, insulated wire, 1m, conductor diameter 0.125mm, insulation thickness 0.014mm, polyester insulation, 99.99%

GF43139538

Gold, insulated wire, 5m, conductor diameter 0.025mm, insulation thickness 0.005mm, polyester insulation, 99.99%

GF11444611

Gold, insulated wire, 5m, conductor diameter 0.05mm, insulation thickness 0.007mm, polyimide insulation, 99.99%

GF49538469

Gold, insulated wire, 2m, conductor diameter 0.05mm, insulation thickness 0.007mm, polyester insulation, 99.99%

GF06766713

Gold, insulated wire, 5m, conductor diameter 0.125mm, insulation thickness 0.014mm, polyester insulation, 99.99%

GF12231223

Gold, microleaf disks, 10mm, thinness 0.25μm, specific density 483μg/cm², removable support, 99.99+%

GF66135641

Gold, microleaf disks, 10mm, thinness 1.0μm, specific density 1932μg/cm², removable support, 99.99+%

GF18244661

Gold, insulated wire, 2m, conductor diameter 0.05mm, insulation thickness 0.009mm, PTFE (polytetrafluoroethylene) insulation, 99.99%

GF82838379

Gold, insulated wire, 0.5m, conductor diameter 0.05mm, insulation thickness 0.007mm, polyester insulation, 99.99%

GF70161780

Gold, tube, 50mm, outside diameter 2.0mm, inside diameter 1.8mm, wall thickness 0.1mm, as drawn, 99.95%

GF58911206

Gold, tube, 200mm, outside diameter 0.3mm, inside diameter 0.2mm, wall thickness 0.05mm, as drawn, 99.95%

GF73271280

Gold, tube, 100mm, outside diameter 0.3mm, inside diameter 0.2mm, wall thickness 0.05mm, as drawn, 99.95%

GF77657574

Gold, sphere, 20pcs, diameter 0.5mm, 99.99%

GF36535563

Gold, rod, 25mm, diameter 5.0mm, as drawn, 99.95%

GF47961243

Gold, tube, 50mm, outside diameter 2.0mm, inside diameter 1.7mm, wall thickness 0.15mm, as drawn, 99.95%

GF71627395

Gold, tube, 200mm, outside diameter 3.0mm, inside diameter 2.8mm, wall thickness 0.10mm, as drawn, 99.95%

GF37867887

Gold, rod, 50mm, diameter 1.6mm, as drawn, 99.95%