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Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

ABSTRACT

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

MATERIALS

Product Number

Brand

Product Description

Sigma-Aldrich

Titanium nitride, <3 μm

Sigma-Aldrich

Titanium, wire, diam. 0.81 mm, 99.7% trace metals basis

Sigma-Aldrich

Titanium, foil, thickness 0.025 mm, 99.98% trace metals basis

Sigma-Aldrich

Titanium, foil, thickness 2.0 mm, 99.7% trace metals basis

Sigma-Aldrich

Titanium, wire, diam. 1.0 mm, 99.99% trace metals basis

Sigma-Aldrich

Titanium, wire, diam. 0.25 mm, 99.7% trace metals basis

Sigma-Aldrich

Titanium, 5-10 mm, ≥99.99% trace metals basis (purity exclusive of Na and K content)

Sigma-Aldrich

Titanium, foil, thickness 0.127 mm, 99.7% trace metals basis

Titanium, wire reel, 500m, diameter 0.20mm, annealed, 99.6+%

Titanium, wire reel, 5m, diameter 0.25mm, as drawn, 99.99+%

Titanium, wire reel, 25m, diameter 0.25mm, annealed, 99.6+%

Titanium, wire reel, 25m, diameter 0.20mm, annealed, 99.6+%

Titanium, wire reel, 20m, diameter 1.5mm, as drawn, 99.6+%

Titanium, wire reel, 5m, diameter 1.0mm, as drawn, 99.6+%

Titanium, wire reel, 200m, diameter 0.20mm, annealed, 99.6+%

Titanium, wire reel, 1m, diameter 0.25mm, as drawn, 99.99+%

Titanium, wire reel, 0.5m, diameter 1.0mm, annealed, 99.6+%

Titanium, wire reel, 1m, diameter 0.5mm, as drawn, 99.6+%

Titanium, wire reel, 200m, diameter 0.25mm, annealed, 99.6+%

Titanium, tube, 500mm, outside diameter 9.5mm, inside diameter 8.2mm, wall thickness 0.65mm, annealed, 99.6+%

Titanium, wire reel, 1m, diameter 0.5mm, as drawn, 99.99+%

Titanium, wire reel, 25m, diameter 0.25mm, as drawn, 99.6+%

Titanium, wire reel, 100m, diameter 0.75mm, as drawn, 99.6+%

Titanium, tube, 500mm, outside diameter 2.03mm, inside diameter 1.63mm, wall thickness 0.2mm, annealed, 99.6+%

Titanium, wire reel, 5m, diameter 0.5mm, as drawn, 99.6+%

Titanium, wire reel, 10m, diameter 0.125mm, annealed, 99.6+%

Titanium, wire reel, 25m, diameter 1.0mm, annealed, 99.6+%

Titanium, wire reel, 50m, diameter 0.75mm, as drawn, 99.6+%

Titanium, wire reel, 0.5m, diameter 1.0mm, as drawn, 99.6+%

Titanium, wire reel, 5m, diameter 0.75mm, as drawn, 99.6+%