Nanolithography. Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures.

Nanolithography. Large-scale nanoshaping of ultrasmooth 3D crystalline metallic structures.

Science (New York, N.Y.) (2014-12-17)

Huang Gao, Yaowu Hu, Yi Xuan, Ji Li, Yingling Yang, Ramses V Martinez, Chunyu Li, Jian Luo, Minghao Qi, Gary J Cheng

ABSTRACT

We report a low-cost, high-throughput benchtop method that enables thin layers of metal to be shaped with nanoscale precision by generating ultrahigh-strain-rate deformations. Laser shock imprinting can create three-dimensional crystalline metallic structures as small as 10 nanometers with ultrasmooth surfaces at ambient conditions. This technique enables the successful fabrications of large-area, uniform nanopatterns with aspect ratios as high as 5 for plasmonic and sensing applications, as well as mechanically strengthened nanostructures and metal-graphene hybrid nanodevices.

MATERIALS

Product Number

Brand

Product Description

326542

Sigma-Aldrich

Gold, beads, 1-6 mm, 99.999% trace metals basis

326585

Sigma-Aldrich

Gold, powder, <10 μm, ≥99.9% trace metals basis

349305

Sigma-Aldrich

Gold, wire, diam. 1.0 mm, 99.997% trace metals basis

326526

Sigma-Aldrich

Gold, wire, diam. 0.127 mm, 99.99% trace metals basis

326534

Sigma-Aldrich

Gold, wire, diam. 0.25 mm, ≥99.9% trace metals basis

332461

Sigma-Aldrich

Graphite, flakes

496553

Sigma-Aldrich

Graphite, rod, L 150 mm, diam. 6 mm, 99.995% trace metals basis

282863

Sigma-Aldrich

Graphite, powder, <20 μm, synthetic

349240

Sigma-Aldrich

Gold, foil, thickness 0.25 mm, ≥99.9% trace metals basis

349275

Sigma-Aldrich

Gold, foil, thickness 0.05 mm, 99.99% trace metals basis

373168

Sigma-Aldrich

Gold, evaporation slug, diam. × L 0.6 cm × 0.6 cm, 99.99% trace metals basis

310980

Sigma-Aldrich

Gold, wire, diam. 0.5 mm, 99.99% trace metals basis

349283

Sigma-Aldrich

Gold, wire, diam. 0.1 mm, 99.99% trace metals basis

265772

Sigma-Aldrich

Gold, powder, <45 μm, 99.99% trace metals basis

496596

Sigma-Aldrich

Graphite, powder, <45 μm, ≥99.99% trace metals basis

496537

Sigma-Aldrich

Graphite, rod, L 150 mm, diam. 3 mm, low density, 99.995% trace metals basis

265829

Sigma-Aldrich

Gold, foil, thickness 0.5 mm, 99.99% trace metals basis

265837

Sigma-Aldrich

Gold, rod, diam. 3.0 mm, 99.99% trace metals basis

496588

Sigma-Aldrich

Graphite, powder, <150 μm, 99.99% trace metals basis

GF04839767

Gold, tube, 100mm, outside diameter 1.60mm, inside diameter 0.6mm, wall thickness 0.5mm, as drawn, 99.95%

GF73794741

Gold, tube, 200mm, outside diameter 2.0mm, inside diameter 1.8mm, wall thickness 0.1mm, as drawn, 99.95%

GF98812097

Gold, rod, 6mm, diameter 6.0mm, as drawn, 99.95%

GF03557336

Gold, rod, 10mm, diameter 6.0mm, as drawn, 99.95%

GF05586969

Gold, tube, 100mm, outside diameter 3.0mm, inside diameter 2.8mm, wall thickness 0.10mm, as drawn, 99.95%

GF26034320

Gold, tube, 100mm, outside diameter 10.0mm, inside diameter 9.7mm, wall thickness 0.15mm, as drawn, 99.95%

GF37996789

Gold, tube, 200mm, outside diameter 2.0mm, inside diameter 1.7mm, wall thickness 0.15mm, as drawn, 99.95%

GF50454132

Gold, insulated wire, 2m, conductor diameter 0.125mm, insulation thickness 0.014mm, polyester insulation, 99.99%

GF75346678

Gold, insulated wire, 0.5m, conductor diameter 0.075mm, insulation thickness 0.012mm, PTFE (polytetrafluoroethylene) insulation, 99.99%

GF33293729

Gold, insulated wire, 0.1m, conductor diameter 0.125mm, insulation thickness 0.016mm, PTFE (polytetrafluoroethylene) insulation, 99.99%

GF38598980

Gold, microfoil, disks, 10mm, thinness 0.5μm, specific density 966μg/cm², permanent mylar 3.5μm support, 99.99+%