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Fused-silica focusing lens for deep UV laser processing.

Fused-silica focusing lens for deep UV laser processing.

Applied optics (1992-08-01)

T Y Hung, C S Su

RÉSUMÉ

A simple four-element fused-silica lens is presented that has a focal length of 31.2 mm and a relative aperture of f/1 for use as a focusing lens for deep UV laser processing. The curvature of the lens is designed with a practical design method to match the curvature of existing optical tools. By applying an 8.5-mm beam diameter Nd:YAG laser at a wavelength of 266 nm through the lens, we can easily achieve the percussion drilled into samples of 25-microm-thick tantalum foil with a hole diameter of <6 microm. When the lens and/or the sample is tilted, the shape of the drilled hole is in agreement with the Gaussian beam spot simulation.

MATÉRIAUX

Référence du produit

Marque

Description du produit

Tantalum, foil, 50x50mm, thickness 0.5mm, annealed, 99.9%

Tantalum, foil, 100x100mm, thickness 1.0mm, annealed, 99.9%

Tantalum, foil, 100x100mm, thickness 0.25mm, annealed, 99.9%

Tantalum, foil, light tested, 150x150mm, thickness 0.05mm, annealed, 99.9%

Tantalum, foil, 100x100mm, thickness 0.100mm, annealed, 99.9%

Tantalum, foil, 100x100mm, thickness 0.125mm, annealed, 99.9%

Tantalum, foil, 50x50mm, thickness 6.0mm, 99.9%

Tantalum, foil, 150x150mm, thickness 0.100mm, annealed, 99.9%

Tantalum, foil, light tested, 100x100mm, thickness 0.025mm, as rolled, 99.9%

Tantalum, foil, light tested, 100x100mm, thickness 0.05mm, annealed, 99.9%

Tantalum, foil, 1m coil, thickness 0.009mm, 99.9%

Tantalum, foil, 1m coil, thickness 0.04mm, coil width 1mm, annealed, 99.9%

Tantalum, foil, 4mm disks, thickness 0.075mm, annealed, 99.9%

Tantalum, foil, light tested, 25x25mm, thickness 0.034mm, as rolled, 99.9%

Tantalum, foil, not light tested, 25x25mm, thickness 0.0075mm, 99.9%

Tantalum, foil, 25x25mm, thickness 1.0mm, annealed, 99.9%

Tantalum, foil, 50x50mm, thickness 0.125mm, annealed, 99.9%

Tantalum, foil, 8mm disks, thickness 0.006mm, 99.9%

Tantalum, foil, light tested, 100x100mm, thickness 0.03mm, as rolled, 99.9%

Tantalum, foil, light tested, 25x25mm, thickness 0.025mm, as rolled, 99.9%

Tantalum, foil, light tested, 50x50mm, thickness 0.05mm, annealed, 99.9%

Tantalum, foil, light tested, 50x50mm, thickness 0.075mm, annealed, 99.9%

Tantalum, foil, not light tested, 25x25mm, thickness 0.004mm, 99.9%

Tantalum, foil, not light tested, 25x25mm, thickness 0.006mm, 99.9%

Tantalum, foil, not light tested, 25x25mm, thickness 0.01mm, 99.9%

Tantalum, foil, 100x100mm, thickness 0.25mm, annealed, 99.99%

Tantalum, foil, 25x25mm, thickness 0.5mm, annealed, 99.9%

Tantalum, foil, 25x25mm, thickness 0.5mm, annealed, 99.99%

Tantalum, foil, 50x50mm, thickness 0.100mm, annealed, 99.9%

Tantalum, foil, 0.2m coil, thickness 0.009mm, 99.9%