Condensation and polymerization of supersaturated monomer vapor.

Initiated chemical vapor deposition (iCVD) of poly(glycidyl methacrylate) from supersaturated monomer vapor is reported. Rapid film growth rates, up to 600 nm/min, were observed. Films grown from supersaturated monomer exhibited distinct surface undulations. The temporal evolution of surface features during film growth was studied and is explained by monomer condensation followed by droplet coalescence and film growth. High droplet densities were observed at the early times and are attributed to rapid polymerization of monomer within condensed liquid nuclei. Droplet nucleation resulting in surface undulations can be avoided by first depositing a thin, cross-linked film from ethylene glycol diacrylate monomer followed by deposition of supersaturated monomer vapors.