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Merck

463094

Sigma-Aldrich

Trimethylboran

electronic grade, ≥98.35%

Synonym(e):

Trimethylborane

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About This Item

Lineare Formel:
B(CH3)3
CAS-Nummer:
Molekulargewicht:
55.91
EG-Nummer:
MDL-Nummer:
UNSPSC-Code:
12352300
PubChem Substanz-ID:

Qualität

electronic grade

Assay

≥98.35%

Form

gas

Eignung der Reaktion

core: boron

Verunreinigungen

<1 ppm Oxygen (O2)
<1.5% Dimethylethylborane [B(CH3)2C2H5]
<10 ppm Carbon dioxide (CO2)
<10 ppm Nitrogen (N2)
<100 ppm Methane (CH4)
<1000 ppm Trimethylamine (TMA)
<50 ppm Hydrogen (H2)

bp

−20.2 °C (lit.)

mp (Schmelzpunkt)

−161.5 °C (lit.)

SMILES String

CB(C)C

InChI

1S/C3H9B/c1-4(2)3/h1-3H3

InChIKey

WXRGABKACDFXMG-UHFFFAOYSA-N

Anwendung

Precursor to boron carbide thin films by chemical vapor deposition (CVD).
Trimethylboron is used as an organometallic precursor for the CVD of boron-carbon containing films and as a boron source in the deposition of borophosphosilicate glass (BPSG).

Empfohlene Produkte

Stainless steel regulators Z527416 or Z527424 are recommended.

Piktogramme

Gas cylinderCorrosion

Signalwort

Danger

H-Sätze

Gefahreneinstufungen

Eye Dam. 1 - Press. Gas Liquefied gas - Skin Corr. 1B

Lagerklassenschlüssel

2A - Gases

WGK

WGK 1

Flammpunkt (°F)

Not applicable

Flammpunkt (°C)

Not applicable

Persönliche Schutzausrüstung

Faceshields, Gloves, Goggles, multi-purpose combination respirator cartridge (US)


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