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Sigma-Aldrich

Hydrogen peroxide solution

semiconductor grade MOS PURANAL (Honeywell 17937), ≥30%

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About This Item

Empirical Formula (Hill Notation):
H2O2
CAS Number:
Molecular Weight:
34.01
Beilstein/REAXYS Number:
3587191
MDL number:
UNSPSC Code:
12352304
PubChem Substance ID:

grade

semiconductor grade MOS PURANAL (Honeywell 17937)

vapor pressure

23.3 mmHg ( 30 °C)

assay

≥30%

CofA

specification on request

shelf life

~2 yr

reaction suitability

reagent type: oxidant

concentration

25-35%

density

1.110 g/cm3

storage temp.

2-8°C

SMILES string

OO

InChI

1S/H2O2/c1-2/h1-2H

InChI key

MHAJPDPJQMAIIY-UHFFFAOYSA-N

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General description

Hydrogen peroxide is a strong oxidizer. It may be produced industrially by anthraquinone oxidation. it is used in semiconductor industry essentially for cleaning silicon wafers, removal of photoresists and to etch metallic copper on printed circuit boards. Ultrapurification of hydrogen peroxide by reverse osmosis has been reported in detail.

Application

Semiconductor grade hydrogen peroxide was used to etch TiN 2 and GaAs structures.

Legal Information

PURANAL is a trademark of Honeywell Specialty Chemicals Seelze GmbH

pictograms

Corrosion

signalword

Danger

hcodes

Hazard Classifications

Aquatic Chronic 3 - Eye Dam. 1

Storage Class

5.1B - Oxidizing hazardous materials

wgk_germany

WGK 1

flash_point_f

Not applicable

flash_point_c

Not applicable

ppe

Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter


Certificates of Analysis (COA)

Search for Certificates of Analysis (COA) by entering the products Lot/Batch Number. Lot and Batch Numbers can be found on a product’s label following the words ‘Lot’ or ‘Batch’.

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Localized GaAs etching with acidic hydrogen peroxide solutions
Shaw DW, et al.
Journal of the Electrochemical Society, 128(4), 874-880 (1981)
Ultrapurification of hydrogen peroxide solution from ionic metals impurities to semiconductor grade by reverse osmosis.
Abejon R, et al.
Separation and Purification Technology, 76(1), 44-51 (2010)
Jose M Campos-Martin et al.
Angewandte Chemie (International ed. in English), 45(42), 6962-6984 (2006-10-14)
Hydrogen peroxide (H2O2) is widely used in almost all industrial areas, particularly in the chemical industry and environmental protection. The only degradation product of its use is water, and thus it has played a large role in environmentally friendly methods
Esther P M Tjin et al.
Cancer immunology research, 2(6), 538-546 (2014-06-05)
In this study, we investigated a large series of immune (escape) markers, relevant to T-cell function, as potential biomarkers for clinical outcome following immunotherapy. We retrospectively studied the expression of immune (escape) markers in metastatic melanoma tissues of 27 patients
Maheswari Jayakannan et al.
Journal of experimental botany, 66(7), 1865-1875 (2015-01-24)
The role of endogenous salicylic acid (SA) signalling cascades in plant responses to salt and oxidative stresses is unclear. Arabidopsis SA signalling mutants, namely npr1-5 (non-expresser of pathogenesis related gene1), which lacks NPR1-dependent SA signalling, and nudt7 (nudix hydrolase7), which

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